Combined In Situ XRD and Ex Situ TEM Studies of Thin Ba0.5Sr0.5TiO3 Films Grown by PLD on MgO,Crystal Research and Technology

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Combined In Situ XRD and Ex Situ TEM Studies of Thin Ba0.5Sr0.5TiO3 Films Grown by PLD on MgO
Crystal Research and Technology ( IF 1.5 ) Pub Date : 2020-07-20 , DOI: 10.1002/crat.201900235
Sondes Bauer ₁ , Adriana Rodrigues ₁ , Xiaowei Jin ₂ , Reinhard Schneider ₂ , Erich Müller ₂ , Dagmar Gerthsen ₂ , Tilo Baumbach _{1,

3}

Affiliation

Dielectric barium strontium titanate films were deposited on MgO (001) substrate by pulsed‐laser deposition (PLD) and monitored in situ by means of reflection high‐energy electron diffraction and time‐resolved X‐ray diffraction (TRXRD). TRXRD showed two growth periods of the BSTO film and a transformation in the crystalline structure was detected as the thickness exceeds 80 nm. The occurrence of two different crystalline regions, namely BSTO1 and BSTO2 was proved by X‐ray diffraction (XRD). Ex situ transmission electron microscopy (TEM) techniques, including diffraction‐contrast as well as high‐resolution TEM, nanobeam electron diffraction, and scanning TEM in combination with energy‐dispersive X‐ray spectroscopy reveal structural and microchemical peculiarities of the BSTO film. By these TEM analyses, the presence of the two different regions BSTO1 and BSTO2 within the PLD‐grown BSTO layer was demonstrated. Regions of phase BSTO2 were found on top of nanoscaled MgO islands formed on the substrate surface during annealing at high temperature. While the majority phase BSTO1 has a single‐crystalline structure over wide ranges, BSTO2 regions seem to be poly‐ or even nanocrystalline, and the chemical composition of the two phases is also different. The transition in the growth periods is presumably related to the occurrence of BSTO2 regions during layer growth.

中文翻译：

MgO上PLD生长Ba0.5Sr0.5TiO3薄膜的原位XRD和异位TEM研究。

介电钛酸锶钡薄膜通过脉冲激光沉积（PLD）沉积在MgO（001）衬底上，并通过反射高能电子衍射和时间分辨X射线衍射（TRXRD）进行现场监测。TRXRD显示了BSTO膜的两个生长周期，并且当厚度超过80 nm时，检测到晶体结构发生了转变。X射线衍射（XRD）证实了BSTO1和BSTO2这两个不同结晶区的出现。异位透射电子显微镜（TEM）技术，包括衍射对比以及高分辨率TEM，纳米束电子衍射和扫描TEM与能量色散X射线光谱相结合，揭示了BSTO膜的结构和微化学特性。通过这些TEM分析，演示了在PLD生长的BSTO层中存在两个不同的区域BSTO1和BSTO2。在高温退火过程中，在衬底表面上形成的纳米级MgO岛顶部发现了BSTO2相区域。尽管多数相BSTO1在宽范围内具有单晶结构，但BSTO2区域似乎是多晶甚至纳米晶，而且两相的化学组成也不同。生长期的过渡可能与层生长期间BSTO2区域的出现有关。BSTO2区域似乎是多晶体甚至是纳米晶体，两相的化学成分也不同。生长期的过渡可能与层生长期间BSTO2区域的出现有关。BSTO2区域似乎是多晶体甚至是纳米晶体，两相的化学成分也不同。生长期的过渡可能与层生长期间BSTO2区域的出现有关。

更新日期：2020-09-09

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