In this paper, we propose a control system for an atomic force microscope (AFM) based on an open-source microcontroller. The system, named J³SPM, offers a low-cost and easy-to-use alternative to existing control systems. The hardware of J³SPM is composed of a data acquisition shield, which is compatible with the Arduino mega and due board and is equipped with a 24-bit resolution analog to digital converter, 16-bit resolution digital to analog converter, function generator, deflection sensor driver, and piezo driver. The control program is implemented using the Arduino integrated development environment. A graphic user interface is developed for the control system. To demonstrate the capability of the presented system, we employ J³SPM with a home-made AFM for imaging a sample with a step height of 21 nm in AC imaging mode.

在本文中，我们提出了一种基于开源微控制器的原子力显微镜（AFM）控制系统。该系统名为J ³ SPM，它是现有控制系统的低成本且易于使用的替代方案。J ³ SPM的硬件由一个数据采集罩组成，该罩与Arduino mega和到期板兼容，并配备有24位分辨率的模数转换器，16位分辨率的数模转换器，函数发生器，偏转传感器驱动器和压电驱动器。控制程序是使用Arduino集成开发环境实现的。为控制系统开发了图形用户界面。为了演示所提出系统的功能，我们使用J ³具有自制AFM的SPM，可在AC成像模式下以21 nm的台阶高度对样品成像。