The paper aims to evaluate the influence of atmospheric environment on the conductivity of nanoscale copper films sputtered on polyester substrates; process parameters of optimal conductivity were firstly analyzed by orthogonal test scheme design, and then the surface morphology, crystal structures and conductivity of samples were performed after samples were placed in the atmospheric conditions for some time according to the optimization of process parameters.,Nanoscale copper films was prepared by RF (radio frequency) magnetron sputtering and low-temperature plasma technology with polyester fabrics as substrates and metal copper as targets under the conditions of low temperature and high vacuum.,The experimental results showed that copper films were broken and the continuity of samples was destroyed after 60 days, while exposed in atmospheric environment for 90 days, cracks of copper films gradually expanded, there was no change in the atomic species for samples placed in the atmospheric conditions. However, the conductivity of the samples hardly had changed with the ambient temperature, humidity and degree of water washing, which is mainly decided by the internal structures of substrates.,This paper has some theoretical and applicable value to the functional textile.

中文翻译：

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大气环境对聚酯基板溅射纳米铜膜形貌及电导率影响的研究

本论文旨在评估大气环境对溅射在聚酯基板上的纳米铜膜导电性的影响；首先通过正交试验方案设计分析最佳电导率的工艺参数，然后根据工艺参数的优化将样品置于大气条件下一段时间后，对样品的表面形貌、晶体结构和电导率进行分析。以涤纶织物为基材,金属铜为靶材,在低温高真空条件下,采用RF(射频)磁控溅射和低温等离子技术制备薄膜,实验结果表明铜膜断裂且连续样品在 60 天后被销毁，在大气环境中暴露90天后，铜膜的裂纹逐渐扩大，放置在大气环境中的样品的原子种类没有变化。然而,样品的电导率几乎没有随环境温度、湿度和水洗程度而变化,这主要是由基材的内部结构决定的。,本文对功能性纺织品具有一定的理论和应用价值。