In this paper, multilayer coatings consisted of amorphous AlCrYN layers and TiBN layers were deposited by the cosputtering technique. The influence of the modulation period of the multilayer coatings on the structure, mechanical properties, and oxidation behavior of the coatings was studied carefully by using scanning electron microscope, X-ray diffraction, nanoindentation, scratch tester, and thermogravimetric analyzer. The results show that the TiBN/AlCrYN multilayer coatings exhibit an amorphous structure without any feature. Decreasing the modulation period could significantly improve the coating hardness and elastic modulus. In addition, the adhesion of the multilayer coatings could be enhanced as the modulation period decreases. At relative low oxidation temperature (≤900°C), a dense aluminum oxide layer formed on the coating surface can effectively hinder the inward diffusion of O and the outward diffusion of metal elements. The oxidation behaviors of the TiBN/AlCrYN multilayer coatings obeyed the diffusion control law. The oxidation resistance of the coatings was increasing with decreasing the modulation period since the interfaces of multilayer structures would block the diffusion of elements. At relative high oxidation temperature (1000°C), however, the coating surface was rapidly oxidized into the porous TiO2 whiskers rather than the dense Al2O3 layer, resulting in the inward diffusion of O and thus causing the serious oxidation of the coatings.

中文翻译：

---

不同调制周期的非晶TiBN/AlCrYN多层涂层的沉积和性能

在本文中，通过共溅射技术沉积了由非晶 AlCrYN 层和 TiBN 层组成的多层涂层。使用扫描电子显微镜、X射线衍射、纳米压痕、划痕仪和热重分析仪仔细研究了多层涂层的调制周期对涂层结构、力学性能和氧化行为的影响。结果表明，TiBN/AlCrYN 多层涂层呈现无定形结构，没有任何特征。降低调制周期可以显着提高涂层硬度和弹性模量。此外，随着调制周期的减少，多层涂层的附着力可以增强。在相对较低的氧化温度（≤900°C）下，涂层表面形成致密的氧化铝层，能有效阻碍O的向内扩散和金属元素的向外扩散。TiBN/AlCrYN多层涂层的氧化行为服从扩散控制规律。由于多层结构的界面会阻止元素的扩散，涂层的抗氧化性随着调制周期的减少而增加。然而，在相对较高的氧化温度（1000°C）下，涂层表面被迅速氧化成多孔的 TiO2 晶须，而不是致密的 Al2O3 层，导致 O 向内扩散，从而导致涂层严重氧化。TiBN/AlCrYN多层涂层的氧化行为服从扩散控制规律。由于多层结构的界面会阻止元素的扩散，涂层的抗氧化性随着调制周期的减少而增加。然而，在相对较高的氧化温度（1000°C）下，涂层表面被迅速氧化成多孔的 TiO2 晶须，而不是致密的 Al2O3 层，导致 O 向内扩散，从而导致涂层严重氧化。TiBN/AlCrYN多层涂层的氧化行为服从扩散控制规律。由于多层结构的界面会阻止元素的扩散，涂层的抗氧化性随着调制周期的减少而增加。然而，在相对较高的氧化温度（1000°C）下，涂层表面被迅速氧化成多孔的 TiO2 晶须，而不是致密的 Al2O3 层，导致 O 向内扩散，从而导致涂层严重氧化。