We have proposed a novel nano-height cylindrical waveguide in blue GaN-based vertical-cavity surface-emitting lasers (VCSELs). The proposed 5 nm step height cylindrical waveguide using simple processes provides lateral optical confinement and excellent performance in terms of light output power (LOP) and wall plug efficiency (WPE). A fabricated multi-mode VCSEL with 7 μ m emission diameter achieved a LOP of 23.7 mW, maximum external differential quantum efficiency of 43.6%, and WPE of 10% under continuous wave operation at 20 °C. Additionally, a single-mode VCSEL with 3.3 μ m emission diameter exhibited LOP of more than 5 mW and WPE of 9.9%.

中文翻译：

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GaN基垂直腔面发射激光器中的纳米高度圆柱波导

我们已经提出了一种基于蓝色GaN的垂直腔面发射激光器（VCSEL）的新型纳米高度圆柱形波导。提议的5 nm台阶高度圆柱形波导使用简单的工艺就光输出功率（LOP）和壁塞效率（WPE）而言提供了横向光学限制和出色的性能。在20°C的连续波操作下，制造的发射直径为7μm的多模VCSEL的LOP为23.7 mW，最大外部差分量子效率为43.6％，WPE为10％。此外，发射直径为3.3μm的单模VCSEL的LOP大于5 mW，WPE为9.9％。