Fabrication of suspended pyrolytic carbon 3D-microstructures from SU–8 was studied in variable pyrolysis temperatures. The dimensions of suspended parts were from 3 µ m to 1500 µ m in length with one to four anchor points. The pyrolysis temperatures were 800 °C to 1100 °C, and the resulting pyrolysed carbon structures were analyzed in terms of shrinkage, surface roughness, electrical resistivity and carbon bond type. The structural stability of the suspended structures is strongly dependent on the number of anchor points. The successful parameter range, structure design rules and the common failure mechanisms are discussed. The temperature dependency on material properties is studied and analyzed. We observed changes in three stages of the pyrolysis process that impact on the final structural shape and stability.

中文翻译：

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三维热解碳悬浮微结构的制备与设计规则

在不同的热解温度下研究了SU-8悬浮热解碳3D微观结构的制备。悬吊零件的尺寸为3到1500微米，长度为1-4个锚点。热解温度为800℃至1100℃，并且根据收缩率，表面粗糙度，电阻率和碳键类型分析所得的热解碳结构。悬挂结构的结构稳定性在很大程度上取决于锚点的数量。讨论了成功的参数范围，结构设计规则和常见的失效机理。研究和分析了温度对材料性能的依赖性。我们观察到热解过程的三个阶段的变化会影响最终的结构形状和稳定性。