This paper presents an analytical model to estimate the actuation potential of an electrostatic parylene-C diaphragm, processed on a glass wafer using standard microelectromechanical systems (MEMS) process technology, and integrable to polydimethylsiloxane (PDMS) based lab-on-a-chip systems to construct a normally-closed microvalve for flow manipulation. The accurate estimation of the pull-in voltage of the diaphragm is critical to preserve the feasibility of integration. Thus, we introduced an analytical model, in a good agreement with the finite element method (FEM), to extend the solution of the pull-in instability by including the effect of nonlinear stretching for multilayered circular diaphragms. We characterized the operation of fabricated diaphragms with a 300 µ m radius for the parameters, including pull-in voltage (221 V on average), opening and closing response times (in microseconds), repeatability (more than 50 times), and touch area (25.3% ± 2.6% at pull-in p...

中文翻译：

---

MEMS兼容微流控系统的片上阀控静电隔膜的建模和制造

本文提出了一种分析模型，以估算静电聚对二甲苯-C膜片的致动电位，该膜片使用标准的微机电系统（MEMS）工艺技术在玻璃晶圆上进行处理，并且可集成到基于聚二甲基硅氧烷（PDMS）的芯片实验室系统中构造一个常闭的微型阀进行流量控制。膜片吸合电压的准确估算对于保持集成的可行性至关重要。因此，我们引入了一个与有限元方法（FEM）完全一致的分析模型，以通过引入多层圆形膜片的非线性拉伸效应来扩展拉入不稳定性的解决方案。我们对半径为300 µm的振动膜片的工作参数进行了表征，包括引入电压（平均221 V），