Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into standard surface complementary metal oxide semiconductor technology, novel laser scribing, and inkjet printing method. Moreover, current applications involve three aspects: mechanical applications, optical applications, and biomimetic applications. It will develop in the direction of increasing electrothermal efficiency and response speed emphatically. This review encourages achievement of its higher performance and broad applications in the future.

中文翻译：

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软电热致动器的最新进展

近年来，开发软电热致动器（ETA）引起了广泛关注。本文通过五个部分全面回顾了软ETA的最新进展：结构和材料的器件设计、性能、制造方法、应用和前景。研究发现，制造工艺可分为标准表面互补金属氧化物半导体技术、新型激光划线和喷墨打印方法。此外，目前的应用涉及三个方面：机械应用、光学应用和仿生应用。将重点向提高电热效率和响应速度的方向发展。该审查鼓励在未来实现其更高的性能和广泛的应用。