This work focuses on enhancing the sensitivity and reducing the wheatstone bridge non-linearity of the current designs of Micro-Electro-Mechanical systems pressure sensor. Conventionally there are four piezoresistors on the four edges of a square diaphragm. These four peizoreistors give rise to a change in resistance with input stress which is converted to voltage using a wheatstone bridge so that it can be measured. In this renewed proposed design, there are a total of eight sensors on the diaphragm; four dedicated to the compressive and tensile stress on the XX – plane and the other four for the YY – plane. Compressive and tensile forces have similar magnitude but act in opposite directions which isn’t considered in the conventional designs, leading to non-linearity. Thus the non-linearity due to the sign difference in compressive and tensile forces is accounted for by calculating them separately and doubling the sensitivity. Each of these eight sensors include two piezoresistors; one attached to the diaphragm and the other outside forming a hairpin structure. Instead of using the wheatstone bridge for measuring the voltage, we make use of operational amplifiers. Thus removing the wheatstone bridge non–linearity.

中文翻译：

---

具有发夹结构的新型 MEMS 压阻式传感器可增强拉伸和压缩灵敏度并校正非线性

这项工作的重点是提高当前微机电系统压力传感器设计的灵敏度和降低惠斯通电桥非线性。通常在方形膜片的四个边缘上有四个压敏电阻器。这四个压敏电阻会随着输入应力产生电阻变化，使用惠斯通电桥将其转换为电压，以便进行测量。在这个更新的提议设计中，膜片上共有八个传感器；四个专用于 XX – 平面上的压缩和拉伸应力，另外四个用于 YY – 平面。压缩力和拉伸力具有相似的大小，但作用方向相反，这在传统设计中没有考虑，从而导致非线性。因此，由于压缩力和拉伸力的符号差异导致的非线性是通过分别计算它们并将灵敏度加倍来解决的。这八个传感器中的每一个都包括两个压敏电阻；一个附着在隔膜上，另一个在外面形成发夹结构。我们不使用惠斯通电桥测量电压，而是使用运算放大器。从而消除惠斯通电桥非线性。