Abstract This paper presents a NO2 sensor operating at low temperature, which was fabricated by ZnO nanoparticles-loaded In2O3 hollow microspheres composites. SEM, XRD, XPS and HRTEM were executed to determine the morphology and microstructure of ZnO–In2O3. The sensing performance of pure In2O3 and ZnO–In2O3 composite sensors was tested. The NO2 sensing properties of the composite were greatly improved in contrast with the pure In2O3 sensor at the optimized operating temperature (75 °C). ZnO–In2O3 composite sensor exhibited an obviously higher response (805.2 for 100 ppb NO2) than that of the pure In2O3 sensor (14 for 100 ppb NO2). In particular, the response/recovery rate of ZnO–In2O3 composite sensor was greatly improved in contrast with the pure In2O3 sensor. The n-n heterojunctions created at ZnO–In2O3 interfaces improved the sensing performance.

中文翻译：

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高灵敏度ZnO纳米颗粒负载In2O3空心微球，用于在低工作温度下检测ppb级NO2

摘要 本文提出了一种低温操作的NO2 传感器，该传感器由负载ZnO 纳米颗粒的In2O3 空心微球复合材料制成。使用 SEM、XRD、XPS 和 HRTEM 来确定 ZnO-In2O3 的形貌和微观结构。测试了纯 In2O3 和 ZnO-In2O3 复合传感器的传感性能。在优化的工作温度 (75 °C) 下，与纯 In2O3 传感器相比，复合材料的 NO2 传感特性得到了极大改善。ZnO-In2O3 复合传感器表现出明显高于纯 In2O3 传感器（100 ppb NO2 为 14）的响应（100 ppb NO2 为 805.2）。特别是，与纯 In2O3 传感器相比，ZnO-In2O3 复合传感器的响应/恢复率大大提高。