Piezoelectric actuators are well known for their high precision, and are promising for applications in microrobotics, drug delivery and nanopositioning. However, a piezoelectric traveling wave ultrasonic micromotor is very hard to control due to the frictional drive principle. This work introduces a closed-loop control strategy for a micromotor. An integrating on-chip structure with a piezoelectric stator and sensor alignment is firstly achieved within a 5 × 5 mm 2 area, which provides in-situ detection during rotation. With the help of real-time detection and control, a high angular resolution of 0.3° is realized for the micromotor.

中文翻译：

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通过嵌入式原位检测实现压电行波微电机的精确步进控制

压电致动器以其高精度着称，并有望用于微机器人，药物输送和纳米定位。然而，由于摩擦驱动原理，压电行波超声微电机很难控制。这项工作介绍了微电机的闭环控制策略。首先在5×5 mm 2的面积内实现了具有压电定子和传感器对准功能的集成片上结构，该结构可在旋转过程中提供原位检测。借助实时检测和控制，微电机可实现0.3°的高角度分辨率。