The design and processing of vibrational energy harvester based on screen‐printed piezoelectric lead zirconate titanate (Pb(ZrxTi1‐x)O3 (PZT)) are described here. Two different structures, a simple cantilever and a complex zig‐zag geometry made of PZT layer sandwiched between gold electrodes and supported on a metallic stainless steel substrate have been successfully fabricated by screen printing thick film technique. Compared to bulk PZT ceramics, the main limiting features at different scales are porosity, interfaces, and bending issues. The microstructural analysis of the interfaces in the cantilever has highlighted the formation of an interface between the substrate and the bottom electrode which ensures cohesion of the structure but can limit its dynamic. Bending has shown to be dependent on the thickness of the active piezoelectric layer. Dielectric and electromechanical characterizations performed on multilayers, bulk ceramics, and free‐standing screen‐printed disks are compared and discussed on the basis of interface issues.

中文翻译：

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专门用于能量收集应用的丝网印刷PZT开发单晶不锈钢悬臂的关键特征

本文描述了基于丝网印刷的压电锆钛酸铅钛酸盐（Pb（ZrxTi1-x）O3（PZT））的振动能量收集器的设计和处理。通过丝网印刷厚膜技术成功地制造了两种不同的结构，即由夹在金电极之间并支撑在金属不锈钢基底上的PZT层制成的简单悬臂和复杂的曲折几何形状。与块状PZT陶瓷相比，不同比例的主要限制特征是孔隙率，界面和弯曲问题。悬臂中的界面的微观结构分析突显了衬底和底部电极之间的界面的形成，该界面确保了结构的内聚力，但会限制其动力学。弯曲已显示出取决于有源压电层的厚度。