In this article, we report the design and fabrication for planar-type incandescent microfilaments on the silicon on insulator (SOI) wafer. The micro-electro-mechanical systems (MEMS) process with XeF₂ etching is used to construct the suspension structure for the reduction of thermal conduction. The fabricated line-type microfilament has a low operation voltage of 4 V. Besides, the operation voltages for the $1\times 4$ , $5\times 5$ , $6\times 6$ , and $7\times 7$ arrays at 50 mtorr are 4.0, 9.0, 9.5, and 9.5 V, respectively. The $1\times 4$ array filament exhibits the measured lifetime of 200 hrs and the predicted lifetime of about 570 hrs. The microfilament has a continuous broadband spectrum that covers from visible light extended to over $3~{\mu }\text{m}$ , which is a suitable light source for near-infrared spectroscopy.

中文翻译：

---

具有低电压操作的基于 MEMS 的平面白炽微丝

在本文中，我们报告了绝缘体上硅 (SOI) 晶片上平面型白炽微丝的设计和制造。采用 XeF ₂蚀刻的微机电系统 (MEMS) 工艺构建悬挂结构以减少热传导。制造的线型微丝具有 4 V 的低工作电压。 $1\乘以 4$ , $5\乘以5$ , $6\乘以6$ ， 和 $7\乘以7$ 50 mtorr 的阵列分别为 4.0、9.0、9.5 和 9.5 V。这 $1\乘以 4$ 阵列灯丝的实测寿命为 200 小时，预计寿命约为 570 小时。微丝具有连续的宽带光谱，覆盖从可见光延伸到超过 $3~{\mu}\text{m}$ ，这是一种适合近红外光谱的光源。