Abstract Chromium nitride coatings prepared by physical vapour deposition (PVD) show high hardness, high strength and good thermal conductivity, which makes them useful for cutting and forming tools. In this article, the microstructure and corrosion resistance of multilayer Cr/CrN coatings deposited by arc evaporation and hybrid high power impulse magnetron sputtering (hybrid HIPIMS) after oxidation between 500 and 800°C were examined. The average thickness of the coatings was about 3.5 µm. By means of the surface morphology analysis, elemental energy spectrometry and potentiodynamic polarization tests, the performances of the two groups of coatings have been compared. The results revealed that the coating deposited by the hybrid HIPIMS has stronger binding force with substrate, fewer surface defects and a denser structure. Also, the hybrid HIPIMS coatings have a better oxidation resistance and a better corrosion resistance compared to the arc evaporated coatings.

中文翻译：

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氧化处理后混合HIPIMS沉积的多层CrN涂层的腐蚀行为

摘要 物理气相沉积（PVD）制备的氮化铬涂层具有高硬度、高强度和良好的导热性，可用于切削和成型工具。在本文中，研究了通过电弧蒸发和混合高功率脉冲磁控溅射（混合 HIPIMS）沉积的多层 Cr/CrN 涂层在 500 到 800°C 之间氧化后的微观结构和耐腐蚀性。涂层的平均厚度约为 3.5 µm。通过表面形貌分析、元素能谱分析和动电位极化测试，比较了两组涂层的性能。结果表明，混合HIPIMS沉积的涂层与基材的结合力更强，表面缺陷更少，结构更致密。还，