In this paper, we theoretically investigate the spectroscopic properties of a simple hybrid metasurface consisting in a periodic array of a Si-Au pattern in the mid-infrared spectral region. Our simulations show that our hybrid metasurface exhibits a strong spectral absorption band in the $5.5\mu m-10\mu m$ region, by comparison to the typical Au-Au counterpart. A considerable improvement to the full-metal metasurface approach is that resonance in the mid-infrared is obtained with a pattern cell of just λ/1.5 instead of the typical λ/5 to λ/8 requirement that occurs in full-metal structures, which relaxes the manufacturing constraints. To fully characterize the surface around resonance, we also performed wave propagation and thermal deposition investigations, the latter of which allows predictions of the shift in the resonance frequency caused by thermal dilation. The proposed metasurface constitutes a good candidate for use in mid-infrared and thermal detection devices, and benefits from the advantages of on-chip integration and scalability in THz generation-detection systems.

在本文中，我们从理论上研究了一个简单的混合超颖表面的光谱性质，该表面由中红外光谱区域中的Si-Au图案的周期阵列组成。我们的模拟表明，我们的杂化超表面表现出较强的光谱吸收带。$5.5\mu 米-10\mu 米$与典型的Au-Au对应区域相比。甲相当大的改进，以全金属超颖表面的方法是在中红外共振与刚刚的图案细胞获得λ /1.5而不是典型的λ / 5〜λ全金属结构中出现的/ 8要求放宽了制造限制。为了充分表征共振周围的表面，我们还进行了波传播和热沉积研究，通过后者可以预测由热膨胀引起的共振频率的变化。拟议的超颖表面构成了在中红外和热探测设备中使用的良好候选者，并受益于太赫兹发电探测系统的片上集成和可扩展性的优势。