Electronic and information hardware is developing in the direction of lightweight products, miniaturization, and integration. The transformer is still the most effective solution for signal isolation and power transfer. In response to the key problems of microtransformer fabrication, this paper presents a hybrid method for fabricating micro/nano structures via femtosecond laser wet etch technology and liquid metal microinjection. This research aims to develop a new method of creating an integrated microtransformer, offering an effective solution for the fabrication of widely applicable 3D integrated complex structures. The embedded 3D microtransformer can be easily integrated with other microelectrical, mechanical, and optical systems, with potential applications in MEMS, sensors and lab-on-chips.

中文翻译：

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飞秒激光微纳加工处理的3D集成无芯微变压器

电子和信息硬件正在朝着轻量级产品，小型化和集成化的方向发展。变压器仍然是信号隔离和功率传输的最有效解决方案。针对微变压器制造的关键问题，本文提出了一种通过飞秒激光湿法刻蚀技术和液态金属显微注射技术制造微纳结构的混合方法。这项研究旨在开发一种创建集成微型变压器的新方法，为制造广泛适用的3D集成复杂结构提供有效的解决方案。嵌入式3D微型变压器可轻松与其他微电子，机械和光学系统集成，在MEMS，传感器和芯片实验室中具有潜在的应用。