X-ray photoelectron spectroscopy (XPS) is widely used to identify chemical species at a surface through the observation of peak positions and peak shapes. It is less widely recognized that intensities in XPS spectra can also be used to obtain information on the chemical composition of the surface of the sample and the depth distribution of chemical species. Transforming XPS data into meaningful information on the concentration and distribution of chemical species is the topic of this article. In principle, the process is straightforward, but there are a number of pitfalls that must be avoided to ensure that the information is representative and as accurate as possible. This paper sets out the things that should be considered to obtain reliable, meaningful, and useful information from quantitative XPS. This includes the necessity for reference data, instrument performance checks, and a consistent and methodical method for the separation of inelastic background from peaks. The paper contains relevant and simple equations along with guidance on their use, validity, and assumptions.

中文翻译：

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X射线光电子能谱实用指南：定量XPS

X射线光电子能谱（XPS）被广泛用于通过观察峰位置和峰形状来识别表面的化学物质。人们还不太了解XPS光谱的强度还可以用于获取有关样品表面化学成分和化学物质深度分布的信息。将XPS数据转换为有关化学物质浓度和分布的有意义的信息是本文的主题。原则上，该过程很简单，但是必须避免很多陷阱，以确保信息具有代表性并尽可能准确。本文列出了从定量XPS获得可靠，有意义和有用信息时应考虑的事项。这包括参考数据的必要性，仪器性能检查，以及从峰中分离非弹性背景的一致且有条理的方法。本文包含相关的简单方程式，以及有关其用法，有效性和假设的指导。