The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal network's pores with TiN via remote plasma-enhanced atomic layer deposition (PEALD). This ZnO-TiN nanocomposite exhibits a plasmonic resonance that is blueshifted compared to planar titanium nitride thin films. The authors study the effects of PEALD conditions and the ZnO film thickness on the plasmonic response of these nanocomposites and exploit the optimized film in a device that generates photocurrent at zero bias.

中文翻译：

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氧化锌和氮化钛的等离子纳米复合材料

作者通过将等离子合成的ZnO纳米晶体沉积到基板上，然后通过远程等离子增强原子层沉积（PEALD）用TiN填充纳米晶体网络的孔，从而制作了等离子ZnO-TiN纳米复合膜。与平面氮化钛薄膜相比，该ZnO-TiN纳米复合材料表现出蓝移的等离子体共振。作者研究了PEALD条件和ZnO膜厚度对这些纳米复合物的等离子体响应的影响，并在可在零偏压下产生光电流的设备中利用了优化的膜。