The results of studies of the microstructure, phase state, and physicomechanical properties of 3 μm thick Al–Si–N and Zr–Y–O coatings obtained by pulsed magnetron sputtering on the surface of single-crystal m-Si are reported. It was found that for Al–Si–N and Zr–Y–O coatings the light transmittance in the visible range of the spectrum reaches 83 and 78%, respectively. It was shown that the crack resistance of m-Si samples with protective coatings is two to three times higher than that for the initial silicon samples. The results of laboratory tests of the resistance of the samples to impact loads on interaction with a flow of high-speed (5 – 7 km/sec) solid microparticles of Fe showed that 3 μm thick protective coatings on m-Si samples makes it possible to suppress surface erosion of the latter by preventing the formation of fine craters.

中文翻译：

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硅耐冲击陶瓷纳米复合涂层性能的研究与开发

报道了在单晶m -Si表面上通过脉冲磁控溅射获得的3μm厚Al–Si–N和Zr–Y–O涂层的微观结构，相态和物理力学性能的研究结果。研究发现，对于Al–Si–N和Zr–Y–O涂层，可见光谱范围内的透光率分别达到83％和78％。结果表明，具有保护性涂层的m -Si样品的抗裂性是初始硅样品的抗裂性的2至3倍。实验室测试样品对与高速（5 – 7 km / sec）Fe固体微粒相互作用的冲击载荷的抵抗力的实验结果表明，在m上有3μm厚的保护涂层-Si样品可以通过防止形成细的坑而抑制后者的表面腐蚀。