Two-dimensional periodic patterns with various periods and shapes were investigated via a novel two-axis Lloyd’s mirror interferometer, which allows the two mirrors to rotate independently. We created a theoretical model to reveal the relationships of all parameters in the system configuration and corresponding periodic arrays including the shapes of each nanostructure pattern by the polarization modulation. The wafer-level non-uniformity of the periodic arrays depends on the size of the expanded laser beams. Finally, we developed software with a friendly user interface to provide easy access to the theoretical model that configures the system and designs nanostructure arrays.

通过新颖的两轴劳埃德镜干涉仪研究了具有不同周期和形状的二维周期性图案，该镜允许两个镜独立旋转。我们创建了一个理论模型，以揭示系统配置中所有参数与相应周期阵列之间的关系，其中包括通过极化调制的每个纳米结构图案的形状。周期性阵列的晶片级不均匀性取决于扩展的激光束的大小。最后，我们开发了具有友好用户界面的软件，可轻松访问配置系统和设计纳米结构阵列的理论模型。