Abstract

An experimental study of laser ablation on the samples that comprise nanofilms of hafnium and zirconium dioxides on the surface of glass and silicon, and obtaining parameters of pulsed laser ablation in this work, provide new data describing the ablation mechanism. The samples were exposed to pulsed radiation from an Nd³⁺:YAG laser in order to measure the threshold energy density of laser ablation and determine the parameters used in the simulation of statistical distributions. Based on these data, the dependences of the parameters of laser ablation on the optical and thermophysical characteristics of these oxides were obtained.

中文翻译：

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Laser和二氧化锆纳米涂层复合材料的激光烧蚀破坏研究

摘要

对玻璃和硅表面上包含ha和二氧化锆纳米薄膜的样品进行激光烧蚀的实验研究，并在此工作中获得脉冲激光烧蚀的参数，为描述烧蚀机理提供了新数据。将样品暴露于Nd ³⁺：YAG激光的脉冲辐射中，以测量激光烧蚀的阈值能量密度并确定用于模拟统计分布的参数。基于这些数据，获得了激光烧蚀参数对这些氧化物的光学和热物理特性的依赖性。