Nanoindentation and microbending testing were used to investigate the mechanical properties of Zr(Hf)Cu thin-film alloys prepared by nonreactive magnetron co-sputtering. A detailed analysis of nanoindentation data and microscopic images of indents allowed a more precise determination of the effective Young's modulus of the films thanks to taking the pile-up effect into account. Microbending testing in a scanning electron microscope was performed with microcantilevers fabricated by focused ion beam and the data were evaluated using a finite element method model. As outputs of this elasto-plastic model, Young's modulus, yield strength, elastic strain, apparent yield point and approximate ultimate strength and strain of the films were determined. From material point of view, the effect of elemental composition (Cu content and Hf substitution) and the structure (glassy and crystalline) was investigated and discussed. It was shown that the substitution of Hf for Zr has less pronounced effect on the mechanical properties than the increase in the Cu content in the films that leads to a pronounced increase in the hardness, Young's modulus, elastic strain, yield strength, apparent yield point and ultimate strength but also to a decrease in the plastic parameter k and ultimate strain. Furthermore, a different atomic ordering in the crystalline and glassy ZrCu films of the identical elemental composition results in differences in their mechanical properties and deformation behavior. The crystalline film was observed to be harder and stiffer with approximately the same elastic strain but higher yield strength and its plastic deformation was free of shear band events.

纳米压痕和微弯曲测试用于研究Zr（Hf）的力学性能通过非反应磁控管共溅射制备的铜薄膜合金。由于对纳米压痕数据和压痕的显微图像进行了详细分析，因此考虑到了堆积效应，因此可以更精确地确定薄膜的有效杨氏模量。用聚焦离子束制造的微悬臂梁在扫描电子显微镜中进行微弯曲试验，并使用有限元方法模型评估数据。作为该弹塑性模型的输出，确定了薄膜的杨氏模量，屈服强度，弹性应变，表观屈服点以及近似极限强度和应变。从材料的角度，研究和讨论了元素组成（铜含量和Hf取代）和结构（玻璃态和晶体）的影响。k和极限应变。此外，在相同元素组成的晶体和玻璃态Zr Cu膜中，不同的原子序数会导致其机械性能和变形行为不同。观察到该结晶膜更硬和更硬，具有大致相同的弹性应变，但是具有较高的屈服强度，并且其塑性变形没有剪切带事件。