Abstract In this paper, we propose a fringe analysis method to address the problem of phase retrieval from interferogram corrupted with fringe amplitude non-uniformity, and show its practical application for nanoscale surface profilometry. The proposed method relies on the implementation of second order optimization combined with total variation regularization using graphic processing unit based computing. The capability of the proposed method is demonstrated via numerical simulations by inducing different amplitude non-uniformity patterns in the interferograms and through experimental non-invasive surface topography using diffraction phase microscopy.

中文翻译：

---

用于精密非接触式光学轮廓测量的非均匀振幅变化的解调干涉图

摘要 在本文中，我们提出了一种条纹分析方法来解决因条纹幅度不均匀而损坏的干涉图的相位检索问题，并展示了其在纳米表面轮廓测量中的实际应用。所提出的方法依赖于使用基于图形处理单元的计算结合全变差正则化的二阶优化的实现。通过在干涉图中引入不同的幅度非均匀性图案和使用衍射相位显微镜进行实验性非侵入性表面形貌，通过数值模拟证明了所提出方法的能力。