In this investigation, gas sensors based on zinc oxide (ZnO) nanorods (NRs) with Co concentration were successfully fabricated and explored. A 100 nm-thick ZnO film was deposited as a seed layer onto Corning glass substrate via radio frequency (RF) magnetron sputtering technique. Then, Co-doped ZnO (CZO) NR arrays were grown by using a simple chemical bath deposition (CBD) method at 95 °C for 3 h and annealing at 450 °C, in which the Co-doping contents are 0, 5, and 10 mM. The surface-to-volume ratio of CZO NRs was higher than that of the pure ZnO structure. X-ray diffraction (XRD) results showed that the synthesised NRs were a single crystalline of the hexagonal wurtzite structure with uniform growth orientation of the c -axis. In addition, increasing ethanol (C 2 H 5 OH) response depends on O vacancy (V O ) adsorption, which is measured via photoluminescence (PL) emission. Compared with pure ZnO NRs, the results showed that the CZO-5 (with 5 mM...

中文翻译：

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基于共掺杂ZnO纳米棒阵列的气体传感器的特性

在这项研究中，成功​​地制造和探索了基于Co浓度的氧化锌（ZnO）纳米棒（NRs）的气体传感器。通过射频（RF）磁控溅射技术，将100 nm厚的ZnO膜作为种子层沉积在康宁玻璃基板上。然后，通过使用简单的化学浴沉积（CBD）方法在95°C下进行3 h并在450°C下退火，以生长Co掺杂的ZnO（CZO）NR阵列，其中Co掺杂的含量为0、5，和10毫米。CZO NRs的表面体积比高于纯ZnO结构。X射线衍射（XRD）结果表明，合成的NRs是六方纤锌矿结构的单晶，其c轴的生长方向均匀。此外，乙醇（C 2 H 5 OH）响应的增加取决于O空位（VO）的吸附，通过光致发光（PL）发射来测量。与纯ZnO NRs相比，结果显示CZO-5（5 mM ...