X-ray production cross sections for M${}_3$, M${}_4$ and M${}_5$ subshells of Pt and Au by electron impact were experimentally determined at incident energies ranging between 2.8 and 28 keV. To this purpose, Pt and Au thick targets were irradiated by an electron beam in a field emission gun scanning electron microscope, and the x-ray emission spectra were recorded with an energy dispersive spectrometer. The x-ray production cross sections were obtained as a result of the spectral processing performed through a careful parameter optimization routine previously developed, which involves an analytical function for the prediction of the experimental spectra, on the basis of ionization depth distribution functions. The results are compared with the scarce data available in the literature.

中文翻译：

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电子撞击对Pt和Au的M3，M4和M5子壳产生的实验X射线横截面

M的X射线生产横截面${}_3$，M${}_4$ 和M${}_5$在2.8至28 keV的入射能量下，通过实验确定了Pt和Au的电子轰击的子壳。为此，在场发射枪扫描电子显微镜中用电子束照射Pt和Au厚的靶，并用能量分散光谱仪记录X射线发射光谱。通过预先开发的仔细的参数优化例程对光谱进行处理，从而获得X射线产生的横截面，该例程包含基于电离深度分布函数的用于预测实验光谱的分析函数。将结果与文献中可用的稀有数据进行比较。