The corundum-structured seeds have been introduced into alumina films usingAl + α -Al 2 O 3 composite and Al 100−x Cr x (x = 10, 20, 30) alloy as targets by reactive magnetron sputtering. The effects of the seeds on the elemental composition, phase composition, structure characteristic, surface morphology and nano-hardness of the alumina-based films have been investigated. The Al target has also been sputtered to prepare the alumina film as reference. The film is composed of single-phase α -Al 2 O 3 by sputtering theAl + α -Al 2 O 3 composite target at 550 °C, while the solid solution α -type (Al 0.7 Cr 0.3 ) 2 O 3 was detected in the film prepared with the Al 70 Cr 30 target at the same temperature. The nano-hardness of the pure α -Al 2 O 3 film and the α -(Al 0.7 Cr 0.3 )

中文翻译：

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刚玉结构的晶种对氧化铝基薄膜低温生长和硬度的影响

通过反应磁控溅射，将以Al +α-Al 2 O 3复合材料和Al 100-x Cr x（x = 10、20、30）合金为靶材，将刚玉结构的晶种引入氧化铝膜中。研究了种子对氧化铝基薄膜的元素组成，相组成，结构特征，表面形态和纳米硬度的影响。还溅射Al靶以制备氧化铝膜作为参考。通过在550°C下溅射Al +α-Al 2 O 3复合靶材，该膜由单相α-Al 2 O 3组成，而在室温下检测到固溶体α型（Al 0.7 Cr 0.3）2 O 3。在相同温度下用Al 70 Cr 30靶制备的薄膜。纯α-Al 2 O 3膜和α-（Al 0.7 Cr 0.3）的纳米硬度