We report the first experimental parametric analysis of subwavelength monolithic high-contrast grating (MHCG) mirrors. To date, subwavelength grating mirrors have been fabricated by suspending a thin grating membrane in the air or placing it on a low refractive index material – a scheme that requires sophisticated processing and makes the gratings sensitive to mechanical stress, impeding current injection, and heat dissipation if used in active devices. Inherently MHCGs are well suited for optoelectronic devices because they can be fabricated in all possible material systems. Here we demonstrate above 90% optical power reflectance, strong polarization discrimination. Based on experimental analysis aided by numerical simulations, we demonstrate the possibility of tuning the spectral characteristics of MHCGs reflectance for more than 200 nm via modification of the duty cycle of the MHCG stripes. We show our MHCG tuning method is convenient to define the properties of MHCG devices during the device processing.

中文翻译：

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通过改变其空间尺寸来调整单片高对比度光栅的反射光谱

我们报告了亚波长单片高对比度光栅（MHCG）镜子的第一个实验参数分析。迄今为止，亚波长光栅镜是通过将薄的光栅膜悬挂在空气中或将其放置在低折射率材料上而制成的–该方案需要复杂的处理，并使光栅对机械应力敏感，从而阻止电流注入和散热。如果在有源设备中使用。MHCG本质上非常适合光电器件，因为它们可以在所有可能的材料系统中制造。在这里，我们证明了90％以上的光功率反射率，强偏振辨别力。基于数值模拟的实验分析，我们展示了通过修改MHCG条的占空比来调节MHCG反射光谱特性超过200 nm的可能性。我们展示了我们的MHCG调整方法可方便地在设备处理过程中定义MHCG设备的属性。