A commercial Empyrean X-ray diffractometer was adapted for combined grazing incidence X-ray fluorescence analysis (GIXRF) measurements with X-ray reflectivity (XRR) measurements. An energy-dispersive silicon drift detector was mounted and integrated in the angle-dependent data acquisition of the Empyrean. Different monochromator/X-ray optics units have been compared with the values obtained by the Atominstitut GIXRF + XRR spectrometer. Data evaluation was performed by JGIXA, a special software for combined GIXRF + XRR data fitting, developed at Atominstitut. A sample consisting of a ~50 nm nickel layer on a silicon substrate was used to compare the performance criteria (i.e. divergence and intensity) of the incident beam optics. An Empyrean X-ray diffractometer was successfully refitted to measure both GIXRF and XRR data.

中文翻译：

---

改装用于组合 GIXRF 和 XRR 测量的 X 射线衍射系统

商业 Empyrean X 射线衍射仪适用于结合掠入射 X 射线荧光分析 (GIXRF) 测量和 X 射线反射率 (XRR) 测量。能量色散硅漂移探测器安装并集成在 Empyrean 的角度相关数据采集中。已将不同的单色仪/X 射线光学装置与 Atominstitut GIXRF + XRR 光谱仪获得的值进行了比较。数据评估由 Atominstitut 开发的用于组合 GIXRF + XRR 数据拟合的特殊软件 JGIXA 执行。由硅衬底上的~50 nm 镍层组成的样品用于比较入射光束光学器件的性能标准（即发散度和强度）。Empyrean X 射线衍射仪已成功改装以测量 GIXRF 和 XRR 数据。