Abstract Over the years, there have been many improvements to the depth sensing indentation testing methodology and measurement electronics. These advancements provide opportunities to develop novel testing capabilities and also improve the reliability of the measurements. In this regard, a comprehensive model for simulating a constant indentation strain rate continuous stiffness measurement (CSM) test that includes the elastic-plastic response of the material and the response of the phase lock amplifier (PLA) is developed to understand the parameters affecting the precision and accuracy of the measurements. A novel test methodology that does not require closed-loop feedback is developed based on the model predications, and is found to improve the precision and accuracy of the CSM based indentation measurements. A procedure to correct for the plasticity error during CSM testing is also developed. Guidelines for selecting test parameters to stay within an acceptable level of error are established.

中文翻译：

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通过连续刚度测量了解和模拟纳米压痕过程中的塑性误差

摘要 多年来，深度传感压痕测试方法和测量电子学有了许多改进。这些进步为开发新的测试能力和提高测量的可靠性提供了机会。在这方面，开发了一个用于模拟恒定压痕应变率连续刚度测量 (CSM) 测试的综合模型，其中包括材料的弹塑性响应和锁相放大器 (PLA) 的响应，以了解影响测量的精度和准确度。基于模型预测开发了一种不需要闭环反馈的新型测试方法，并发现可以提高基于 CSM 的压痕测量的精度和准确度。还开发了在 CSM 测试期间纠正塑性误差的程序。建立了选择测试参数以保持在可接受的误差水平内的指南。