Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown.

中文翻译：

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微型微波驱动等离子体射流的理论研究

微波和射频驱动的等离子体射流在许多技术应用中发挥着重要作用。它们通常在称为 E 模式的电容模式下运行。作为一种新的等离子体源，已经提出了 MMWICP（微型微波 ICP），这是一种具有电感耦合的小规模等离子体射流，它基于用作 LC 谐振电路的专门设计的谐振器。这项工作基于谐振器中电磁场的一系列表示和等离子体内损耗过程的体积积分（全局）模型，提出了新设备的理论模型。可以找到无限数量的模式，这些模式按方位波数 m 排序。这些模式本质上决定了系统的电磁行为，与普通腔模式不同。模式m=0可以与电感模式识别，称为H模式，模式m=1为电容模式，称为E模式。两种模式指的是不同的操作状态，它们由不同的等离子体参数值分开。在第二步中，匹配网络及其特性被考虑在内，以便找到稳定的平衡点和可能的滞后效应。作为主要结果，显示了对 MMWICP 谐振器进行感应功率耦合的可行性。