This paper describes the frequency characteristics of a highly sensitive barometric pressure change sensor. Here, we propose a method to measure pressure changes based on microelectromechanical systems piezoresistive cantilevers and an air chamber. The proposed sensor structure realizes a mechanical high pass filter to eliminate the influence of the barometric pressure change due to meteorological variations. The experimental frequency characteristics indicate that the proposed sensor unit with a high resolution of less than 0.1 Pa from 0.1 to 10 Hz responds to pressure changes with a high pass filter property according to the chamber volume size.

中文翻译：

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基于MEMS压阻悬臂的高灵敏度气压变化传感器的时间响应特性

本文介绍了一个高灵敏度的气压变化传感器的频率特性。在这里，我们提出了一种基于微机电系统的压阻悬臂和气室来测量压力变化的方法。所提出的传感器结构实现了机械高通滤波器，以消除由于气象变化而引起的气压变化的影响。实验频率特性表明，所提出的传感器单元在0.1到10 Hz之间具有小于0.1 Pa的高分辨率，可根据腔室体积大小对压力变化做出响应，并具有高通滤波器特性。