A 128 $\times $ 128 single-photon avalanche diode (SPAD) motion detection-triggered time-of-flight (ToF) sensor is implemented in STMicroelectronics 40 nm CMOS SPAD foundry process. The sensor combines vision and ToF ranging functions to acquire depth frames only when inter-frame intensity changes are detected. The 40 $\mu \text{m}\,\,\times $ 20 $\mu \text{m}$ pixels integrate two 16-bit time-gated counters to acquire ToF histograms and repurpose them to compare two vision frames without the requirement for additional out-of-pixel frame memory resources. An embedded column-parallel ToF and vision processor performs on-chip vision frame comparison and binary frame output compression as well as controlling the time-resolved histogram sampling. The sensor achieves a maximum 32.5 kframes/s in vision modality and 500 frames/s in motion detection-triggered ToF over a measured 3.5 m distance with 1.5 cm accuracy. The vision function reduces the sensor power consumption by 70% over continuous ToF operation and allows the sensor to gate the ToF laser emitter to reduce the system power when no motion activity is observed.

中文翻译：

---

具有像素内直方图和列并行视觉处理器的 128 x 128 SPAD 运动触发飞行时间图像传感器

128 $\times $ 128 个单光子雪崩二极管 (SPAD) 运动检测触发的飞行时间 (ToF) 传感器采用 STMicroelectronics 40 nm CMOS SPAD 代工工艺实现。传感器结合视觉和 ToF 测距功能，仅在检测到帧间强度变化时获取深度帧。40 $\mu \text{m}\,\,\times $ 20 $\mu \text{m}$ 像素集成两个 16 位时间门控计数器来获取 ToF 直方图，并将它们重新用于比较两个视觉帧，而无需额外的像素外帧内存资源。嵌入式列并行 ToF 和视觉处理器执行片上视觉帧比较和二进制帧输出压缩以及控制时间分辨直方图采样。该传感器在测量的 3.5 m 距离内以 1.5 cm 的精度实现了最大 32.5 kframes/s 的视觉模式和 500 帧/s 的运动检测触发 ToF。在连续 ToF 操作中，视觉功能可将传感器功耗降低 70%，并允许传感器选通 ToF 激光发射器，以在未观察到运动活动时降低系统功率。