Resonant laser sputtered neutral mass spectrometry can greatly enhance the ionization efficiency of specific neutral sputtered atoms through resonant excitation using tunable laser(s). However, the laser beam cannot irradiate the entire volume where sputtered particles are moving, because the laser beam is focused. In contrast, for an extremely low concentration of target elements, it is necessary to increase the laser irradiation efficiency. Irradiation efficiency depends on both spatial coverage and resonance wavelength matching. The former can be increased by increasing the laser path length within the sputtered neutral plume. The latter depends on the relationship between the laser spectral linewidth and the Doppler broadening width caused by the velocity of sputtered neutral particles. The authors have developed a new method to improve the ionization probability of neutral particles by reflecting the laser using mirrors to increase the ionization efficiency based on the concept mentioned above.

中文翻译：

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使用激光的多次反射来抵消多普勒展宽的共振溅射中性质谱

共振激光溅射中性质谱可以通过使用可调谐激光器的共振激发大​​大提高特定中性溅射原子的电离效率。然而，由于激光束是聚焦的，因此激光束不能照射溅射粒子移动的整个体积。相反，对于极低浓度的目标元素，需要提高激光照射效率。辐照效率取决于空间覆盖和共振波长匹配。前者可以通过增加溅射中性羽流内的激光路径长度来增加。后者取决于激光光谱线宽与溅射中性粒子速度引起的多普勒展宽宽度之间的关系。