当前位置: X-MOL 学术J. Vac. Sci. Technol. B › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-05-01 , DOI: 10.1116/6.0000088
Reiko Saito 1, 2 , Haruko Akutsu 3 , Jun Asakawa 3 , Yue Zhao 4 , Kei Kiyokawa 5 , Masato Morita 5 , Tetsuo Sakamoto 5 , Masaaki Fujii 6
Affiliation  

A new laser ionization method for sputtered neutral mass spectrometry (SNMS), which the authors call “dual-laser SNMS,” was developed to increase the ionization probability and improve sensitivity. In this technique, pulsed IR and UV lasers irradiated sputtered atoms simultaneously, while the additional UV laser pulse enhanced the ionization process. The useful yields of the target elements increased by 10%–20% compared to using the IR irradiation alone, and the yield increased with increasing UV power. In addition, there was little correlation between the ionization potential and the ratio of the ionization enhancement. Therefore, dual-laser SNMS was effective for the analysis of elements with higher ionization potential.

中文翻译:

使用脉冲红外和紫外激光提高溅射中性质谱中的电离产率

开发了一种用于溅射中性质谱 (SNMS) 的新激光电离方法,作者称之为“双激光 SNMS”,旨在增加电离概率并提高灵敏度。在这种技术中,脉冲红外和紫外激光同时照射溅射原子,而额外的紫外激光脉冲增强了电离过程。与单独使用 IR 照射相比,目标元素的有用产率增加了 10%–20%,并且产率随着 UV 功率的增加而增加。此外,电离电位与电离增强的比率之间几乎没有相关性。因此,双激光 SNMS 可有效分析具有较高电离电位的元素。
更新日期:2020-05-01
down
wechat
bug