A high-resolution laboratory reflectometer designed for operation in the soft x-ray (SXR) and extreme ultraviolet (EUV) ranges is described. High spectral resolution, up to 0.028 nm, in a wide spectral range is achieved due to the Czerny-Turner monochromator. A laser plasma generated by irradiating a solid-state target with a focused laser beam (wavelength 1.06 µm, pulse energy 0.5 J, duration 4 ns, and pulse repetition rate 10 Hz) is used as a source of SXR and EUV radiation. The goniometer allows the study of curved optical elements with an aperture up to NA = 0.5 and a diameter of up to 500 mm. The methods providing high efficiency of the optical system and spectral resolution in a wide range of wavelengths are described in detail. The problem of taking into account high orders in the recorded spectra of a laser plasma is discussed. A comparison of the measurement results with the described reflectometer and the optics beamline at the BESSY-II synchrotron is given.

中文翻译：

---

用于研究软和极紫外波长范围内的 X 射线光学元件的高分辨率实验室反射计

描述了一种专为在软 x 射线 (SXR) 和极紫外 (EUV) 范围内操作而设计的高分辨率实验室反射计。由于 Czerny-Turner 单色器，在很宽的光谱范围内实现了高达 0.028 nm 的高光谱分辨率。通过用聚焦激光束（波长 1.06 µm，脉冲能量 0.5 J，持续时间 4 ns，脉冲重复频率 10 Hz）照射固态目标产生的激光等离子体用作 SXR 和 EUV 辐射源。测角仪允许研究孔径最大为 NA = 0.5 且直径最大为 500 mm 的弯曲光学元件。详细描述了在很宽的波长范围内提供高效率光学系统和光谱分辨率的方法。讨论了在记录的激光等离子体光谱中考虑高阶的问题。