The device described is the combination of two mass spectrometers, with a surface sample placed between them. Its aim is to allow for detailed research on low-energy ion-surface interactions, involving and triggering surface chemistry. This task is fulfilled by a carefully chosen geometry: Projectile ions from an electron impact source are mass-per-charge selected using a quadrupole. Such continuous bombardment allows for good control of the surface condition. Species emerging from the collisions are focused onto a beam and analyzed using a purpose-built orthogonal pulsing time-of-flight mass spectrometer. Neutral species can be post-ionized using a second electron impact source. Neutral gases can be adsorbed to the surface from the gas phase in a controlled manner, using a feedback-controlled pressure regulator. In order to minimize the discrimination of secondary ions, the distance from the surface to the analyzing mass spectrometer system was kept as short as possible and the acceptance angle of the lens system as large as possible. This increased the sensitivity five orders of magnitude compared to its predecessor. The rigorous use of computer aided design software is responsible for the successful commissioning of the new device. This article describes first which parameters can be measured or controlled. Then, these are linked to the physical processes that occur in reactive ion-surface interactions. Next, the design goal and the design implementation are presented. In the end, a performance comparison, measurements of hydrogen surface chemistry with extensive use of isotope labeling, and measurements of post-ionized beryllium are presented.

中文翻译：

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高灵敏度、高分辨率串联质谱仪，用于研究低能量、反应性离子-表面相互作用

所描述的设备是两个质谱仪的组合，表面样品放置在它们之间。其目的是允许对低能离子表面相互作用进行详细研究，涉及和触发表面化学。这个任务是通过精心选择的几何形状来完成的：来自电子撞击源的射弹离子是使用四极杆选择的每次充电质量数。这种连续轰击可以很好地控制表面状况。碰撞产生的物质被聚焦到光束上，并使用专用的正交脉冲飞行时间质谱仪进行分析。中性物质可以使用第二个电子碰撞源进行后电离。使用反馈控制压力调节器，可以以受控方式将中性气体从气相吸附到表面。为了尽量减少二次离子的辨别，从表面到分析质谱仪系统的距离尽可能短，透镜系统的接受角尽可能大。与其前身相比，这将灵敏度提高了五个数量级。计算机辅助设计软件的严格使用是新设备成功调试的原因。本文首先介绍哪些参数可以测量或控制。然后，这些与反应离子表面相互作用中发生的物理过程相关联。接下来介绍了设计目标和设计实现。最后，介绍了性能比较、广泛使用同位素标记的氢表面化学测量以及后电离铍的测量。