Emerging compositionally engineered complementary metal-oxide-semiconductor (CMOS)-compatible platforms have been employed for high efficiencies in various on-chip applications, including optical parametric amplification and wavelength conversion. Combining the novel nonlinear optics platforms such as ultra-silicon-rich nitride (USRN: Si₇N₃) with periodic waveguide structures can lead to further enhancement of material nonlinearities via the slow light effect and enable ultra-compact devices. Four-wave mixing in a USRN-based, CMOS-compatible, photonic crystal waveguide (PhCWg) leading to on/off optical parametric signal gain reaching 3 dB, and a large instantaneous idler conversion efficiency of −1 dB is explored experimentally. Enhancement of Kerr nonlinearity in the presence of a sizable and near-constant group index allows the findings on an ultra-compact, 97 μm-long PhCWg, equivalent to a large on/off gain per unit length of 333 dB/cm.

中文翻译：

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兼容CMOS的100μm以下光子晶体波导中的光参量增益

新兴的成分工程化互补金属氧化物半导体（CMOS）兼容平台已被用于各种片上应用（包括光学参量放大和波长转换）中的高效率。结合新型非线性光学平台，例如超富硅氮化物（USRN：Si ₇ N ₃具有周期性波导结构的）可以通过缓慢的光效应进一步增强材料的非线性，并实现超紧凑的设备。实验研究了在基于USRN的CMOS兼容光子晶体波导（PhCWg）中进行四波混频，以使开/关光参量信号增益达到3 dB，并且获得了-1 dB的大瞬时惰轮转换效率。在相当大的和接近恒定组索引的存在克尔非线性的增强允许上的超小型，97的结果μ米长PhCWg，相当于上/大断每333分贝/厘米单位长度增益。