A single-mode linear ultrasonic motor was developed in this study. On the stator, a group of four pieces of piezoelectric ceramics PZT8 were utilized to generate the ultrasonic vibration. A specially designed modal conversion horn with an oblique beam was applied to transfer the longitudinal vibration to an additional bending vibration. Modal analysis was conducted by finite element method to illustrate the elliptical vibration process. Then the output performance (e.g. output thrust and output velocity) of the motor was evaluated via a series of experiments. The results show that the simulated amplitudes of longitudinal vibration and bending vibration are 9.6 μm and 3.4 μm, respectively, which match well with the tested results. The output thrust increases with the increase of voltage. The largest output thrust is 10 N at the voltage of 600 Vp-p, and the biggest output velocity is 200 mm/s at the supplied frequency of 19.8 kHz and the driving angle of 45°. The output velocity also decreases with the increase of applied load.

中文翻译：

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单模线性超声电机模态分析及运动性能

本研究开发了一种单模线性超声电机。在定子上，利用一组四片压电陶瓷 PZT8 来产生超声波振动。一个专门设计的带有斜梁的模态转换喇叭被应用于将纵向振动转换为附加的弯曲振动。采用有限元法进行模态分析，说明椭圆振动过程。然后通过一系列实验评估电机的输出性能（例如输出推力和输出速度）。结果表明，纵向振动和弯曲振动的模拟幅值分别为9.6 μm和3.4 μm，与试验结果吻合较好。输出推力随着电压的增加而增加。600 Vp-p电压下最大输出推力为10 N，在19.8 kHz的供给频率和45°的驱动角下，最大输出速度为200 mm/s。输出速度也随着施加载荷的增加而降低。