Abstract TiO2 nanoparticles (NPs) thin films with a thickness of 50 nm and a core-shell nanostructure were prepared using the spin coating technique and were treated using an inductively coupled O2 plasma at low pressure. While no significant features were observed during pumping, two kinetics can be identified during plasma processing using in situ spectroscopic ellipsometry. For very short plasma treatment times, the removal of solvent-based organic moieties surrounding TiO2 nanoparticles produces a densification of the inorganic TiO2 films. Such mineralization effect by the O2 plasma treatment was confirmed by X-ray photoelectron microscopy. For larger time scales, the average size of TiO2 NPs rises and significant changes of the optical properties occur. While no significant changes in the film nanostructure were observed by Scanning Electron Microscopy, a rise in the crystallite size and an increase in the agglomeration of TiO2 nanoparticles were confirmed by Transmission Electron Microscopy and Atomic Force Microscopy, respectively. The mechanisms involved in such plasma-induced modification of nanostructured TiO2 thin films are discussed in line with the energy fluxes of plasma-generated species.

中文翻译：

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使用低压 O2 等离子体处理对锐钛矿 TiO2 纳米颗粒薄膜的光学性质和纳米结晶度进行改性

摘要 使用旋涂技术制备了厚度为 50 nm 的 TiO2 纳米颗粒 (NPs) 薄膜和核壳纳米结构，并在低压下使用电感耦合 O2 等离子体进行处理。虽然在泵送过程中没有观察到显着特征，但在等离子体处理过程中可以使用原位光谱椭偏仪确定两种动力学。对于非常短的等离子体处理时间，去除 TiO2 纳米颗粒周围的溶剂型有机部分会导致无机 TiO2 薄膜的致密化。通过 X 射线光电子显微镜证实了 O2 等离子体处理的这种矿化效果。对于更大的时间尺度，TiO2 NPs 的平均尺寸增加并且光学性质发生显着变化。虽然通过扫描电子显微镜没有观察到薄膜纳米结构的显着变化，但分别通过透射电子显微镜和原子力显微镜证实了微晶尺寸的增加和 TiO2 纳米颗粒的团聚增加。根据等离子体产生的物质的能量通量讨论了这种等离子体诱导纳米结构 TiO2 薄膜的改性机制。