This work aimed to characterize a Dielectric Barrier Discharge (DBD) plasma equipment through optical and electrical measurements, seeking to obtain a greater knowledge of the plasma production process and how it behaves through the adopted parameters, such as frequency and voltage applied betweenelectrodes, at a fixed distance of 1.7 mm. In order to measure them, three different characterization techniques were applied. The first method was the Lissajous figures, a technique quite effective for a complete electrical characterization of DBD equipment. The second technique used was the Optical Emission Spectroscopy, a tool used for the diagnosis of plasma, being it possible to identify the excited species produced in discharge in diffuse and filamentary regime in the plasma. And finally, the triple Langmuir probe technique was used to obtain the electron temperature and electron density. Based on this study, it was possible to identify the equipment efficiency in different regimes. The electron temperature measurement for both systems analyzed were 27.96 eV and 20.69 eV to the filamentary and diffuse regimes, respectively. The density of electrons number to these regimes were 1.09 × 1021 m−3 and 1.56 × 1021 m−3.

中文翻译：

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三重朗缪尔探针，光发射光谱和lissajous图形，用于诊断大气压下平行板的介电势垒放电产生的等离子体

这项工作旨在通过光学和电气测量来表征介电势垒放电（DBD）等离子体设备，以期获得对等离子体产生过程以及其如何通过采用的参数（例如电极之间施加的频率和电压）的行为了解的更多知识。固定距离为1.7毫米。为了测量它们，应用了三种不同的表征技术。第一种方法是Lissajous图形，该技术对于DBD设备的完整电气表征非常有效。所使用的第二种技术是光学发射光谱法，一种用于诊断等离子体的工具，它有可能识别出在等离子体中以弥散和丝状状态放电产生的激发物种。最后，使用三重Langmuir探针技术获得电子温度和电子密度。根据这项研究，可以确定不同状态下的设备效率。对于丝状和扩散态，所分析的两个系统的电子温度测量值分别为27.96 eV和20.69 eV。这些形式的电子数密度为1.09×1021m-3和1.56×1021m-3。