In this paper, a temperature-humidity-pressure (THP) sensor based on surface acoustic wave (SAW) devices is proposed for the simultaneous monitoring of temperature, humidity and pressure. The developed THP sensor consists of three SAW one-port resonators fabricated onto Y-cut LiNbO 3 with frequencies of 81, 85.2, and 89.92 MHz for temperature, humidity and pressure sensing respectively. Graphene oxide was used as a sensitive layer material for the SAW humidity sensor. A flexible cantilever beam was used as a sensitive structure for the pressure sensor. Prior to fabrication, both the temperature sensitivity of the substrate and the deformation of the cantilever beam were simulated using the COMSOL Multiphysics. The frequency drift of the humidity sensor is obtained through analysis. According to the simulation results and analysis, the resonant frequency and frequency distribution of each sensor were reasonably set to avoid mutual interference. Experimental tests demons...

中文翻译：

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基于LiNbO 3的新型声表面波温湿度压力传感器用于环境监测

本文提出了一种基于声表面波（SAW）装置的温湿压力（THP）传感器，用于温度，湿度和压力的同时监测。研发的THP传感器由三个SAW单端口谐振器组成，这些谐振器制作在Y形LiNbO 3上，分别用于温度，湿度和压力感测，频率分别为81、85.2和89.92 MHz。氧化石墨烯用作SAW湿度传感器的敏感层材料。柔性悬臂梁用作压力传感器的敏感结构。在制造之前，使用COMSOL Multiphysics模拟了基板的温度敏感性和悬臂梁的变形。通过分析获得湿度传感器的频率漂移。根据仿真结果与分析，合理设置每个传感器的谐振频率和频率分布，以避免相互干扰。实验测试恶魔...