In large areas of laser drilling, the residual vibration occurs when the sample stage moves in PTP (Point to Point) movement. It affects the surface quality and processing efficiency of the holes. The common solution for this problem is to set the laser irradiation delay time by the controller to wait for the residual vibration attenuation, but the whole drilling circle will increase. In this paper, a new method is introduced to reduce the laser drilling circle. By setting the allowable threshold of the residual vibration for the subsequent process, the sum of the time in deceleration segment of the trapezoidal moving profile, and the time when the residual vibration attenuates below the amplitude threshold (ST) can be minimized as the optimization goal. The results show that for a given operating speed, there is always an optimum acceleration value for the deceleration segment of the trapezoidal moving profile, which minimizes the ST value. Further, the delay time for laser irradiation can also be estimated according to the optimal acceleration during laser drilling.

中文翻译：

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考虑样品台残留振动影响的减少孔群激光打孔时间的新方法

在大面积的激光钻孔中，当样品台以PTP（点对点）运动时，会发生残留振动。它影响孔的表面质量和加工效率。解决此问题的常用方法是通过控制器设置激光照射延迟时间，以等待残留的振动衰减，但是整个钻孔圈都会增加。本文介绍了一种减少激光打孔的新方法。通过设置后续工序的残留振动的容许阈值，可以将梯形运动曲线的减速区间中的时间和残留振动衰减到振幅阈值（ST）以下的时间之和最小化。 。结果表明，对于给定的运行速度，梯形运动曲线的减速段始终有一个最佳的加速度值，可将ST值最小化。此外，还可以根据激光钻孔期间的最佳加速度来估计激光照射的延迟时间。