This paper presents a new strategy for efficiently fabricating large-area subwavelength periodic ripples with commercial grating quality on a silicon surface. Two laser beams of 800 nm, 50 fs at a repeat frequency of 1 kHz were focused on a silicon wafer via two cylindrical lenses. The spacing of the interference fringes was adjusted to excite a coherent resonance-enhanced (CRE) surface plasmon polariton (SPP). The CRE SPP efficiently induced homogeneous and extremely straight periodic ripples through gentle ablation, which avoids substantial debris and reduces the roughness of the periodic ripples. At the two edges of the ablation band after single scanning, the ripples were shallow, spaced, and exceptionally straight, which is greatly advantageous in the preparation of large-area gratings line by line. The subwavelength periodic ripples were fabricated on a silicon wafer with a diameter of 100 mm by scanning at a speed of 2 mm/s and a spacing of 1.55 mm. Compared with the alternating amorphous-crystalline ripples induced by a single laser beam, the fabrication efficiency was enhanced by 2–3 orders. Measurements with a confocal optical microscope and white light diffraction demonstrate that the periodic ripples were extremely straight, smooth, and homogeneous, similar to the gold gratings. The diffraction resolution of the nanogratings of subwavelength periodic ripples was nearly as narrow as that of commercial gratings.

本文提出了一种新的策略，可以有效地在硅表面上制造具有商业光栅质量的大面积亚波长周期性波动。通过两个柱面透镜将两个重复频率为1 kHz的800 nm，50 fs的800 nm激光束聚焦在硅片上。调整干涉条纹的间距以激发相干共振增强（CRE）表面等离子体激元极化子（SPP）。CRE SPP通过温和的烧蚀有效地诱导出均匀且极其笔直的周期性波动，从而避免了大量碎屑并降低了周期性波动的粗糙度。在单次扫描之后，在烧蚀带的两个边缘处，波纹很浅，间隔开并且异常笔直，这在逐行制备大面积光栅时非常有利。通过以2mm / s的速度和1.55mm的间隔进行扫描，在直径为100mm的硅晶片上制造亚波长周期性波纹。与单束激光引起的交替的非晶晶体波纹相比，制造效率提高了2-3个数量级。用共聚焦光学显微镜和白光衍射进行的测量表明，周期性波纹非常直，平滑且均匀，类似于金光栅。亚波长周期性波动的纳米光栅的衍射分辨率几乎与商用光栅一样窄。制造效率提高了2-3个订单。用共聚焦光学显微镜和白光衍射进行的测量表明，周期性波纹非常直，平滑且均匀，类似于金光栅。亚波长周期性波动的纳米光栅的衍射分辨率几乎与商用光栅一样窄。制造效率提高了2-3个订单。用共聚焦光学显微镜和白光衍射进行的测量表明，周期性波纹非常直，平滑且均匀，类似于金光栅。亚波长周期性波动的纳米光栅的衍射分辨率几乎与商用光栅一样窄。