Abstract A non-resonant stepping type piezoelectric actuator with bolt-clamped configuration was developed and tested in this work. This actuator was operated under clamping and driving mechanism by using two longitudinal-bending transducers. The longitudinal and bending deformations of the transducer were used to clamp and drive the slider, respectively. Such principle is totally different from the existing non-resonant actuators. This actuator was designed and its working principle was illustrated in detail. The motion characteristics of the driving foot were investigated by finite element simulation and experimental methods. A prototype was manufactured to validate the feasibility of the actuator driven by clamping and driving principle. The average step distance was tested as about 10.8 μm under the voltage and frequency of 400 Vp-p and 1 Hz. This actuator achieved the maximum velocity of 0.72 mm/s under the frequency of 60 Hz, and it outputted a velocity about 1.42 μm/s when the load mass was 1.47 kg. The tested results under PID closed-loop control indicated that this actuator acquired a positioning accuracy about 30 nm for 100 μm target displacement.

中文翻译：

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基于夹紧驱动机构的螺栓夹紧式压电执行器的设计与实验验证

摘要 在这项工作中开发并测试了一种螺栓夹紧结构的非谐振步进式压电致动器。该致动器通过使用两个纵向弯曲换能器在夹紧和驱动机构下操作。换能器的纵向和弯曲变形分别用于夹紧和驱动滑块。这种原理与现有的非共振致动器完全不同。设计了该执行器并详细说明了其工作原理。通过有限元仿真和实验方法研究了驱动脚的运动特性。制造了一个原型来验证由夹紧和驱动原理驱动的执行器的可行性。在 400 Vp-p 和 1 Hz 的电压和频率下，测试的平均步距约为 10.8 μm。该执行器在60Hz频率下实现了0.72mm/s的最大速度，在负载质量为1.47kg时输出速度约为1.42μm/s。PID 闭环控制下的测试结果表明，该执行器对于 100 μm 目标位移获得了约 30 nm 的定位精度。