Ultrasonic bonding is a convenient bonding technology, which features sufficient cleanliness, high efficiency, no need for additional bonding aids, and other outstanding advantages. In recent years, it has been introduced into the field of the micro–nano assembly of polymer micro–nano devices, but it is still difficult for current ultrasonic bonding technology to meet the accuracy requirements of the micro–nano assembly. To improve the control accuracy of the hot-melt interface in the process of ultrasonic bonding, an online hot-melt interface monitoring method and an online ultrasonic transmission efficiency detection method are proposed in this article. With these detection methods, the real-time monitoring of the hot-melt interface can be realized on the basis of machine vision, while high-frequency dynamic force sensors can be used to detect the ultrasonic vibration transmitted from the ultrasonic horn to the anvil. Based on these methods, a functional anvil based on visual monitoring and ultrasonic detection is developed, the finite element method has been used to analyze the transmission characteristics of ultrasonic vibration, and experiments are carried out regarding online detection in the process of ultrasonic bonding. The results show that this system can realize the online detection of the hot-melt interface and ultrasonic transmission information, providing a new control method for ultrasonic bonding technology.

超声波粘接是一种方便的粘接技术，它具有足够的清洁度，高效率，无需额外的粘接助剂以及其他突出的优点。近年来，它已被引入聚合物微纳米器件的微纳米组件领域，但是当前的超声键合技术仍然很难满足微纳米组件的精度要求。为了提高超声粘接过程中热熔界面的控制精度，提出了一种在线热熔界面监测方法和一种在线超声传输效率检测方法。通过这些检测方法，可以基于机器视觉实现对热熔界面的实时监控，高频动态力传感器可用于检测从超声变幅杆传递到砧座的超声振动。基于这些方法，开发了一种基于视觉监测和超声检测的功能砧座，采用有限元方法分析了超声振动的传递特性，并进行了超声粘结过程中在线检测的实验。结果表明，该系统可以实现对热熔界面和超声波传输信息的在线检测，为超声波粘接技术提供了一种新的控制方法。利用有限元方法分析了超声振动的传递特性，并进行了超声键合过程中在线检测的实验。结果表明，该系统可以实现对热熔界面和超声传输信息的在线检测，为超声粘接技术提供了一种新的控制方法。利用有限元方法分析了超声振动的传递特性，并进行了超声键合过程中在线检测的实验。结果表明，该系统可以实现对热熔界面和超声波传输信息的在线检测，为超声波粘接技术提供了一种新的控制方法。