Abstract After the Cu coating layer was fabricated, the high energy beam was irradiated and the mechanical properties of the Cu coating layer before and after irradiation were compared. As the high energy beam is irradiated onto the material of the coating layer, the dipole of the polar material rotates, and the coating layer is heated due to the intermolecular friction, thereby resulting in a heat treatment effect even in a short time. Scanning electron microscopy analysis confirmed that the surface structure was changed, and X-ray diffraction and X-ray photoelectron spectroscopy were used to confirm the crystallinity and bonding state from Cu to CuO. In addition, in the nanoindentation analysis, all improved mechanical properties were observed for martens hardness, indentation hardness and indentation modulus. It is clear that this method will be widely used in various fields in the near future to change the surface layer phase to improve mechanical properties.

中文翻译：

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通过高能束功能化的 Cu 涂层的相变改善机械性能

摘要 Cu镀层制作完成后，进行高能束辐照，比较辐照前后Cu镀层的力学性能。由于高能光束照射在涂层材料上，极性材料的偶极子旋转，涂层由于分子间摩擦而被加热，从而在短时间内产生热处理效果。扫描电子显微镜分析证实表面结构发生了变化，并使用 X 射线衍射和 X 射线光电子能谱来确认从 Cu 到 CuO 的结晶度和键合状态。此外，在纳米压痕分析中，马氏硬度、压痕硬度和压痕模量均观察到了所有改进的机械性能。