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Time stability characterization of quadrupole mass spectrometers
Measurement ( IF 5.6 ) Pub Date : 2020-06-27 , DOI: 10.1016/j.measurement.2020.108143
Alper Elkatmis , Rifat Kangi , Ute Becker , Karl Jousten , Domenico Mari , Frederic Boineau , Martin Vicar , Salustiano Ruiz , Janez Setina

This study focuses on the time stability of different metrological characteristics of quadrupole mass spectrometers (QMSs). Investigated parameters were the sensitivity, when using a Faraday cup as a detector, the peak position, the peak width, the gain of a secondary electron multiplier, and the minimum detectable partial pressure. Eight different commercial QMSs were investigated at seven national metrology institutes under three different nominal calibration pressures of 5 × 10−6 Pa, 5 × 10−5 Pa, and 5 × 10−4 Pa for N2 and He. The measurements were carried out using a periodicity of approximately 3 months for a total duration of 2 years. Sensitivity calibrations were conducted either through a comparison method using calibrated ionization gauges or by applying a primary vacuum calibration system. In the case of ionization gauges, they were periodically recalibrated to ensure their stability and traceability to a primary pressure standard.



中文翻译:

四极杆质谱仪的时间稳定性表征

这项研究的重点是四极质谱仪(QMS)不同计量特性的时间稳定性。研究的参数是使用法拉第杯作为检测器时的灵敏度,峰位置,峰宽,二次电子倍增器的增益和最小可检测分压。在七个不同的N 2的标称校准压力分别为5×10 -6 Pa,5×10 -5 Pa和5×10 -4 Pa的三种国家标定压力下研究了八种不同的商业QMS。和他。使用大约3个月的周期进行测量,总持续时间为2年。灵敏度校准是通过使用已校准的电离规的比较方法或通过应用主真空校准系统来进行的。对于电离表,它们会定期进行重新校准,以确保其稳定性和可追溯性至一次压力标准。

更新日期:2020-06-27
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