Hybrid quantum systems are essential for the realization of distributed quantum networks. In particular, piezo-mechanics operating at typical superconducting qubit frequencies features low thermal excitations, and offers an appealing platform to bridge superconducting quantum processors and optical telecommunication channels. However, integrating superconducting and optomechanical elements at cryogenic temperatures with sufficiently strong interactions remains a tremendous challenge. Here, we report an integrated superconducting cavity piezo-optomechanical platform where 10 GHz phonons are resonantly coupled with photons in a superconducting cavity and a nanophotonic cavity at the same time. Taking advantage of the large piezo-mechanical cooperativity (C_em ~7) and the enhanced optomechanical coupling boosted by a pulsed optical pump, we demonstrate coherent interactions at cryogenic temperatures via the observation of efficient microwave-optical photon conversion. This hybrid interface makes a substantial step towards quantum communication at large scale, as well as novel explorations in microwave-optical photon entanglement and quantum sensing mediated by gigahertz phonons.

混合量子系统对于实现分布式量子网络至关重要。特别是，在典型的超导量子比特频率下工作的压电力学具有低热激发，并提供了一个有吸引力的平台来桥接超导量子处理器和光通信通道。然而，在低温下将超导和光机械元件与足够强的相互作用集成仍然是一个巨大的挑战。在这里，我们报告了一个集成的超导腔压电光机械平台，其中 10 GHz 声子与超导腔和纳米光子腔中的光子同时共振耦合。利用大的压电机械协同性（C _em ~7）和脉冲光泵增强的光机械耦合，我们通过观察有效的微波-光学光子转换证明了低温下的相干相互作用。这种混合接口朝着大规模量子通信以及由千兆赫声子介导的微波-光学光子纠缠和量子传感方面的新探索迈出了实质性的一步。