In this work, undoped and lanthanum doped cupric oxide (CuO:La) nanorods structured thin films were deposited at different concentrations (CLO) on p-type silicon substrates using the spray pyrolysis technique at 350 °C. XRD, AFM, SEM, and EDX techniques were used to investigate the structural, morphological, and compositional analysis, respectively. A decrease in crystallite size was observed from 13.4 to 7.75 nm and even the peak diffraction intensity decreased with an increase in La concentration. The hexagonal structure of the La2O3 phase with poor orientation planes was observed at 7 wt% La. Amplitude parameters, grain size, and atoms distribution were discussed from AFM analysis. SEM images show a uniform distribution and homogeneous crystalline construction supported by quadrilateral pillars with nanorods-like in shape. The sensitivity, recovery, and response time for CLO thin films as room temperature NO2 sensor devices were calculated. The effect of lanthanum concentration on the sensing mechanism of CuO thin films also has been reported.

中文翻译：

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基于La2O3掺杂CuO薄膜的室温气体传感器

在这项工作中，使用喷雾热解技术在 350°C 下以不同浓度 (CLO) 在 p 型硅衬底上沉积未掺杂和镧掺杂的氧化铜 (CuO:La) 纳米棒结构薄膜。XRD、AFM、SEM 和 EDX 技术分别用于研究结构、形态和成分分析。观察到晶粒尺寸从 13.4 nm 减小到 7.75 nm，甚至峰值衍射强度随着 La 浓度的增加而降低。在 7 wt% La 下观察到具有不良取向面的 La2O3 相的六方结构。从 AFM 分析中讨论了振幅参数、晶粒尺寸和原子分布。SEM 图像显示由具有纳米棒状形状的四边形柱支撑的均匀分布和均质晶体结构。灵敏度，计算了作为室温 NO2 传感器装置的 CLO 薄膜的恢复和响应时间。镧浓度对CuO薄膜传感机制的影响也有报道。