Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to to guarantee traceability at any scale and utilize the full potential of these instruments, but transfer standards with similar characteristics upon reflection to those of the measured samples are preferred. This is currently not the case for samples featuring dimensions of less than 10 nm and for biosamples with different optical charasteristics to silicon, silica or metals. To address the need for 3D images of biosamples with traceable dimensions, we introduce a transfer standard with dimensions guaranteed by natural self-assembly and a material that is optically similar to that in typical biosamples. We test the functionality of these transfer standards by first calibrating them using an Atomic Force Microscope (AFM) and then using them to calibrate a CSI. We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system. The result is that the calibration uncertainty is only marginally increased due to the sample.

中文翻译：

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用于生物样品 3D 计量的基于自组装的台阶高度标准

现代显微镜和轮廓仪（例如相干扫描干涉仪 (CSI)）在高度测量中接近亚纳米级精度。需要所有测量尺寸尺度的传递标准，以保证任何尺度的可追溯性并充分利用这些仪器的潜力，但在反射后具有与测量样品特征相似的传递标准是首选。目前，对于尺寸小于 10 nm 的样品以及与硅、二氧化硅或金属具有不同光学特性的生物样品，情况并非如此。为了满足对具有可追溯尺寸的生物样品的 3D 图像的需求，我们引入了一种尺寸由自然自组装保证的转移标准和一种在光学上与典型生物样品中的材料相似的材料。我们首先使用原子力显微镜 (AFM) 校准这些传输标准，然后使用它们校准 CSI，从而测试这些传输标准的功能。我们调查是否可以达到足够好的校准精度以实现对 CSI 系统的有用校准。结果是校准不确定度因样品而仅略微增加。